ALD

E-Beam Evaporator

All users of the AJA e-beam evaporators are required to sign-up for the NanoFab’s Slack site. Please read the instructions on how to sign-up and utilize Slack.

Joining Slack Channels

The NanoFab Slack site utilizes channels #ebeamevaportor for ongoing discussions between users on crucible changes. Once you have access to the NanoFab Slack page, you can join these channels with the following steps:

Click on CHANNELS on the top left of the NanoFab Slack site
This will open the channel browser, where you can search, sort, and explore all the channels.
To join a specific channel, click the Join Channel button and you will then have access to these topic specific channels.

E-Beam Evaporator Material Changes

Chamber venting and material changes will be carried out on Mondays and Thursdays from 5PM to 9PM by NanoFab Staff only.

  1. All material changes will be scheduled using the Google Sheets Doc.
  2. There are two tabs, one showing the currently installed materials (titled “Materials”) and one schedule the upcoming material changes (titled “Upcoming Changes”).
  3. Fill in the material you need on the appropriate pocket and chamber vent date. Remember to add your email, e.g. Ag (xxxx@email.edu).
  4. You can also add comments in the cell to the far right of the sheet.
  5. Please use the Slack Channel #ebeamevaportor for any discussions with fellow users and staff as needed, however the Upcoming Changes list will be the final scheduling tool.
  6. Never delete another users’ entry.
  7. Bring up any scheduling issues via the Slack channel.
  8. Cr, Ti and Au will always be kept in the chamber unless Staff have reason to change it out temporarily. This will be communicated if we do so.
  9. Please be considerate when filling out your slots. Staff always have the right to make changes (with sufficient notification) and will monitor any abuse of scheduling.

Furnace

PECVD

Sputter

Sputter SOP

Sputter-Parameters

All users of the AJA sputter deposition are required to sign-up for the NanoFab’s Slack site. Please read the instructions on how to sign-up and utilize Slack.

Joining Slack Channels

The NanoFab Slack site utilizes channels #sputterdeposition for ongoing discussions between users on target. Once you have access to the NanoFab Slack page, you can join these channels with the following steps:

  • Click on CHANNELS on the top left of the NanoFab Slack site
  • This will open the channel browser, where you can search, sort, and explore all the channels.
  • To join a specific channel, click the Join Channel button and you will then have access to these topic specific channels.

Sputter Target Changes

A minimum of two days prior to possibly changing out a material, users must post their proposed material change in the appropriate NanoFab Slack channel. When posting your proposal, you must state the following:

  • The material you are putting in
  • The material you are proposing to take out
  • The length of time you will need the material to stay in the chamber

A discussion amongst users can then be had through Slack to collaboratively plan the appropriate time and date of the change. We ask that you be considerate of other users’ needs and try to coordinate in such a way to minimize venting the chamber.

When you change the materials at the tool you must update the Google Doc to reflect the changes. This can be done at the AJA deposition computer.

The current list of installed targets and crucibles can be found here: Target/Crucibles. The link is also pinned on the Slack channels.

Sputter Coater

Thermal Evaporator