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Nanofabrication Facility

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Instruments and Tools

Thermal Processing

  • photo: Tystar mini Tytan furnace stack

    Furnace Stack ›

    The Tystar Mini Tytan Furnace Stack contains two atmospheric pressure that are used to process batches of up to 25 6-inch or 4-inch wafers.
  • photo: Rapid Thermal Anneal (RTA) system

    Rapid Thermal Anneal (RTA) ›

    The Allwin21 AccuThermo AW610 is a rapid thermal processing (RTP) system, which uses high intensity visible radiation to heat single wafers for short process periods of time at precisely controlled temperatures.