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Nanofabrication Facility

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Instruments and Tools

Metrology

  • photo: Bruker 3D optical profiler

    3D Optical Profiler ›

    The Bruker Contour GT-I is a fully automated and programmable optical interferometric microscope that can be used to measure and map surface features in 3D.
  • photo: Bruker FastScan AFM

    Atomic Force Microscope (AFM) ›

    The Bruker Dimension FastScan AFM provides high speed topographic imaging without loss of resolution or force control.
  • photo: V-VASE ellipsometer

    Ellipsometer ›

    The Woollam V-VASE is a Variable Angle Spectroscopic Ellipsometer capable of automated thin-film characterization, high-precision angle, and a wide spectral range (240 nm to 2500 nm).
  • photo: FEI Scanning Electron Microscope

    Field Emission Scanning Electron Microscope (FE-SEM) ›

    The FEI Nova NanoSEM™ is a high resolution scanning electron microscope intended for sample characterization.
  • photo: Nikon Eclipse inspection microscope

    Inspection Microscopes ›

    The system of Nikon Eclipse Inspection Microscopes has a 6”x6” stage and is configured with bright-field, dark-field, and simple polarizing objectives.
  • photo: Signatone probe station

    Probe Station ›

    The probe station is equipped with two Keithley 2400 Source Meters, a Keithley 6485 picoammeter, and a Keithley 2000 Diginal Multimeter.
  • photo: Bruker stylus profiler

    Stylus Profiler ›

    The Bruker Dektak-XT is a semi-automated stylus profiler that can be used to measure step height with better than 5 Å repeatability, surface roughness, as well as 3D surface mapping.
  • photo: Filmetrics F20 thin film analyzer

    Thin Film Analyzer ›

    The Filmetrics F20 is used to measure the thickness and optical constants (n and k) of transparent and semi-transparent thin films.