All Facilities | All Instruments Nanofabrication Facility Back Instruments and ToolsMetrology 3D Optical Profiler › The Bruker Contour GT-I is a fully automated and programmable optical interferometric microscope that can be used to measure and map surface features in 3D. Atomic Force Microscope (AFM) › The Bruker Dimension FastScan AFM provides high speed topographic imaging without loss of resolution or force control. Ellipsometer › The Woollam V-VASE is a Variable Angle Spectroscopic Ellipsometer capable of automated thin-film characterization, high-precision angle, and a wide spectral range (240 nm to 2500 nm). Field Emission Scanning Electron Microscope (FE-SEM) › The FEI Nova NanoSEM™ is a high resolution scanning electron microscope intended for sample characterization. Inspection Microscopes › The system of Nikon Eclipse Inspection Microscopes has a 6”x6” stage and is configured with bright-field, dark-field, and simple polarizing objectives. Probe Station › The probe station is equipped with two Keithley 2400 Source Meters, a Keithley 6485 picoammeter, and a Keithley 2000 Diginal Multimeter. Stylus Profiler › The Bruker Dektak-XT is a semi-automated stylus profiler that can be used to measure step height with better than 5 Å repeatability, surface roughness, as well as 3D surface mapping. Thin Film Analyzer › The Filmetrics F20 is used to measure the thickness and optical constants (n and k) of transparent and semi-transparent thin films.