Stylus Profiler

The Bruker Dektak-XT is a semi-automated stylus profiler that can be used to measure step height with better than 5 Å repeatability, surface roughness, as well as 3D surface mapping.

Specifications

• Motorized X/Y stage with 6 inches of travel, motorized 360 degree rotation
• Includes 2-3, 4-6, or 8″ wafer vacuum chuck
• LIS 3, low inertia sensor with 1 to 15mg of force
• 3.1Mpixel color camera with selectable magnification
• Optically flat scan block with 55mm scan length
• Environmental enclosure to prevent against acoustic interferences
• Better than 5 Å step height repeatability, 1 σ using a 0.1 μm step size
• Stitching for up to 200 mm scans
• 3D map collection and extensive data analysis
• Automated collection capabilities with unlimited number of locations

Contacts

• Maya Narayanan Nair, Ph.D.
  Research Assistant Professor, Nanoscience Initiative
  Facility Staff, Nanofabrication Facility, Surface Science Facility
  mnair@gc.cuny.edu