Stylus Profiler

photo: Bruker stylus profiler

The Bruker Dektak-XT is a semi-automated stylus profiler that can be used to measure step height with better than 5 Å repeatability, surface roughness, as well as 3D surface mapping.


  • Motorized X/Y stage with 6 inches of travel, motorized 360 degree rotation
  • Includes 2-3, 4-6, or 8″ wafer vacuum chuck
  • LIS 3, low inertia sensor with 1 to 15mg of force
  • 3.1Mpixel color camera with selectable magnification
  • Optically flat scan block with 55mm scan length
  • Environmental enclosure to prevent against acoustic interferences
  • Better than 5 Å step height repeatability, 1 σ using a 0.1 μm step size
  • Stitching for up to 200 mm scans
  • 3D map collection and extensive data analysis
  • Automated collection capabilities with unlimited number of locations


  • Maya Narayanan Nair, Ph.D.
    Research Assistant Professor, Nanoscience Initiative
    Facility Staff, Nanofabrication Facility, Surface Science Facility

Manufacturer / Model

Bruker / Dektak-XT


Nanofabrication Facility