Field Emission Scanning Electron Microscope (FE-SEM)

photo: FEI Scanning Electron Microscope

The FEI Nova NanoSEM™ is a high resolution scanning electron microscope intended for sample characterization. In addition to the SEM features, the Nova system is configured with a beam blanker and the Raith ELPHY Quantum software to enable electron beam lithography for users who do not require the ultra-high resolution of the Elionix system.


  • Milan Begliarbekov, Ph.D.
    Technical Cleanroom Manager, Nanofabrication Facility
    Research Assistant Professor, Nanoscience Initiative

Manufacturer / Model

FEI / Nova NanoSEM 450


Nanofabrication Facility