Thin Film Analyzer

photo: Filmetrics F20 thin film analyzer

The Filmetrics F20 is used to measure the thickness and optical constants (n and k) of transparent and semi-transparent thin films. Measured films must be optically smooth and between 100 Å and 50 um thick. Commonly measured films include semiconductor process films such as oxides, nitrides, resists and polysilicon. Films that cannot be measured include very rough films and opaque films. The Filmetrics thin film analyzer is very useful for rapidly fine-tuning resist recipes and measuring etch rates.


Contacts

  • Milan Begliarbekov, Ph.D.
    Technical Cleanroom Manager, Nanofabrication Facility
    Research Assistant Professor, Nanoscience Initiative
    mbegliarbekov@gc.cuny.edu

Manufacturer / Model

F20 / Filmetrics

Facility

Nanofabrication Facility

Keywords

metrology