Stylus Profiler

The Bruker Dektak-XT is a semi-automated stylus profiler that can be used to measure step height with better than 5 Å repeatability, surface roughness, as well as 3D surface mapping.

Specifications

Motorized X/Y stage with 6 inches of travel, motorized 360 degree rotation
Includes 2-3, 4-6, or 8″ wafer vacuum chuck
LIS 3, low inertia sensor with 1 to 15mg of force
3.1Mpixel color camera with selectable magnification
Optically flat scan block with 55mm scan length
Environmental enclosure to prevent against acoustic interferences
Better than 5 Å step height repeatability, 1 σ using a 0.1 μm step size
Stitching for up to 200 mm scans
3D map collection and extensive data analysis
Automated collection capabilities with unlimited number of locations

Equipment Type

Stylus Profiler

Manufacturer

Bruker

Model

Dektak-XT

Location

Metrology Bay