Equipment Type
Spin Rinse Dryer
Manufacturer
OEM
Model
470S
Location
Plasma Bay
Processes
Rinse and dry 4″ and 6″ wafers
The spin rinse dryer offers a fast way to clean and dry wafers in patches up to 25 wafers at a time.
Spin Rinse Dryer
Spin Rinse Dryer
OEM
470S
Plasma Bay
Rinse and dry 4″ and 6″ wafers
The spin rinse dryer offers a fast way to clean and dry wafers in patches up to 25 wafers at a time.