Equipment Rates

Academic, Start-Up and Industry Rates (effective September 1, 2022)

Academic Members Monthly Cap: $1650

Lithography

Equipment Manufacturer Badger Name Academic Rate ($/hr) Start-Up Rate ($/hr) Industry Rate ($/hr)
Electron Beam Lithography – 50keV Elionix EBL_Elionix 60 180 300
Electron Beam Lithography – 100keV Elionix EBL_Elionix 50 150 250
3D Lithography System Nanoscribe 3DLitho_GT 36 108 180
Mask Aligner EV Group Mask_Aligner_EVG620 30 90 150
Photo Resist Spinner Brewer Scientific Photo_Spinner 20 60 100
Ebeam Resist Spinner Brewer Scientific EBL_Spinner 20 60 100
Non Standard Materials Spinner Brewer Scientific Other_Spinner 20 60 100

Deposition

Equipment Manufacturer Badger Name Academic Rate ($/hr) Start-Up Rate ($/hr) Industry Rate ($/hr)
Atomic Layer Deposition Ultratech Cambridge NanoTech ALD_Fiji 36 108 180
PECVD Oxford Instruments PECVD_SYS100 45 135 225
Ebeam and Thermal Evaporator AJA International Ebeam_Evap_O8E 38 114 190
Ebeam and Organics Thermal Evaporator AJA International Organic_Oxide_Ebeam_Evap 38 114 190
Sputtering System AJA International Sputter_O8 30 90 150
Thermal Evaporator AJA International Thermal_Evap_O3TH 15 45 75
Sputter Coater Cressington Scientific Instruments Sputter_Coat_108A 38 114 190

Etching

Equipment Manufacturer Badger Name Academic Rate ($/hr) Start-Up Rate ($/hr) Industry Rate ($/hr)
Chlorine ICP Etcher Oxford Instruments ICP_Cl_SYS100 48 144 240
Fluorine ICP Etcher Oxford Instruments ICP_Fl_SYS100 48 144 240
DRIE Etcher Oxford Instruments DRIE_FL_SYS100 48 144 240
Reactive Ion Etcher Oxford Instruments RIE_NPG80 45 135 225
Plasma Asher PVA TePla Plasma_Asher_ION40 30 90 150
UV Ozone Cleaner SAMCO UV_Ozone_UV2 25 75 125
Vapor HF Etcher SPTS Technologies VaporHF_Primaxx 25 75 125
Xenon Difluoride Etcher SPTS Technologies XeF2_Etch_E1 25 75 125

Metrology

Equipment Manufacturer Badger Name Academic Rate ($/hr) Start-Up Rate ($/hr) Industry Rate ($/hr)
Scanning Electron Microscope FEI SEM_NovaNano 35 105 175
Atomic Force Microscope Bruker AFM_Dimension 35 105 175
Surface Profilometer Bruker Stylus_Prof_Dektak 22 66 110
Optical Profilometer Bruker Optical_Prof_GT-I 20 60 100
Ellipsometer J.A. Woollam Ellipsometer_VVase 25 75 125
Thin Film Analyzer Filmetrics Reflectometer_F20 0 0 0

Thermal Processing

Equipment Manufacturer Badger Name Academic Rate ($/hr) Start-Up Rate ($/hr) Industry Rate ($/hr)
Furnace – Thermal Oxide Tystar Furnace_Thermal_Oxide 25 75 125
Furnace – Anneal Tystar Furnace_Anneal 25 75 125
Furnace – LPCVD Nitride Tystar Furnace_Nitride 30 90 150
Furnace – LPCVD TEOS Tystar Furnace_TEOS 30 90 150
Rapid Thermal Annealer MPT RTA_600S 20 60 100

Back-End Processing

Equipment Manufacturer Badger Name Academic Rate ($/hr) Start-Up Rate ($/hr) Industry Rate ($/hr)
Wire Bonder West Bond Wire_Bonder_454647E 25 75 125
Dicing Saw Disco Dicing_Saw_DAD3220 25 75 125
Film Frame Wafer Mounter Ultron Systems Tape_Mount_UH114 0 0 0
UV Curing System Ultron Systems UV _Curing_ UH102 0 0 0

Chemical Hoods

Equipment Manufacturer Badger Name Academic Rate ($/hr) Start-Up Rate ($/hr) Industry Rate ($/hr)
Resist Hood Air Control Spinner_Hood 0 0 0
Development Hood Air Control Developer_Hood 0 0 0
Solvent Hood Air Control Solvent_Hood 0 0 0
HF/Piranha Hood Air Control HF_Piranha_Hood 0 0 0
Metal/Caustic Etch Hood Air Control Caustic_Hood 0 0 0
RCA Cleaning Hood Air Control RCA_Hood 0 0 0
Spin Rinse Dryer OEM Group SRD_470S 0 0 0

Additional Items

Item Cost Unit
SU-8 Developer $16.63 500 ml
Remover PG $22.88 500 ml
Gold E-Beam Evaporation $0.75 1 nm