Academic, Start-Up and Industry Rates (effective September 1, 2022)
Academic Members Monthly Cap: $1650
Lithography
| Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
| Electron Beam Lithography – 50keV | Elionix | EBL_Elionix | 60 | 180 | 300 |
| Electron Beam Lithography – 100keV | Elionix | EBL_Elionix | 50 | 150 | 250 |
| 3D Lithography System | Nanoscribe | 3DLitho_GT | 36 | 108 | 180 |
| Mask Aligner | EV Group | Mask_Aligner_EVG620 | 30 | 90 | 150 |
| Photo Resist Spinner | Brewer Scientific | Photo_Spinner | 20 | 60 | 100 |
| Ebeam Resist Spinner | Brewer Scientific | EBL_Spinner | 20 | 60 | 100 |
| Non Standard Materials Spinner | Brewer Scientific | Other_Spinner | 20 | 60 | 100 |
Deposition
| Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
| Atomic Layer Deposition | Ultratech Cambridge NanoTech | ALD_Fiji | 36 | 108 | 180 |
| PECVD | Oxford Instruments | PECVD_SYS100 | 45 | 135 | 225 |
| Ebeam and Thermal Evaporator | AJA International | Ebeam_Evap_O8E | 38 | 114 | 190 |
| Ebeam and Organics Thermal Evaporator | AJA International | Organic_Oxide_Ebeam_Evap | 38 | 114 | 190 |
| Sputtering System | AJA International | Sputter_O8 | 30 | 90 | 150 |
| Thermal Evaporator | AJA International | Thermal_Evap_O3TH | 15 | 45 | 75 |
| Sputter Coater | Cressington Scientific Instruments | Sputter_Coat_108A | 38 | 114 | 190 |
Etching
| Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
| Chlorine ICP Etcher | Oxford Instruments | ICP_Cl_SYS100 | 48 | 144 | 240 |
| Fluorine ICP Etcher | Oxford Instruments | ICP_Fl_SYS100 | 48 | 144 | 240 |
| DRIE Etcher | Oxford Instruments | DRIE_FL_SYS100 | 48 | 144 | 240 |
| Reactive Ion Etcher | Oxford Instruments | RIE_NPG80 | 45 | 135 | 225 |
| Plasma Asher | PVA TePla | Plasma_Asher_ION40 | 30 | 90 | 150 |
| UV Ozone Cleaner | SAMCO | UV_Ozone_UV2 | 25 | 75 | 125 |
| Vapor HF Etcher | SPTS Technologies | VaporHF_Primaxx | 25 | 75 | 125 |
| Xenon Difluoride Etcher | SPTS Technologies | XeF2_Etch_E1 | 25 | 75 | 125 |
Metrology
| Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
| Scanning Electron Microscope | FEI | SEM_NovaNano | 35 | 105 | 175 |
| Atomic Force Microscope | Bruker | AFM_Dimension | 35 | 105 | 175 |
| Surface Profilometer | Bruker | Stylus_Prof_Dektak | 22 | 66 | 110 |
| Optical Profilometer | Bruker | Optical_Prof_GT-I | 20 | 60 | 100 |
| Ellipsometer | J.A. Woollam | Ellipsometer_VVase | 25 | 75 | 125 |
| Thin Film Analyzer | Filmetrics | Reflectometer_F20 | 0 | 0 | 0 |
Thermal Processing
| Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
| Furnace – Thermal Oxide | Tystar | Furnace_Thermal_Oxide | 25 | 75 | 125 |
| Furnace – Anneal | Tystar | Furnace_Anneal | 25 | 75 | 125 |
| Furnace – LPCVD Nitride | Tystar | Furnace_Nitride | 30 | 90 | 150 |
| Furnace – LPCVD TEOS | Tystar | Furnace_TEOS | 30 | 90 | 150 |
| Rapid Thermal Annealer | MPT | RTA_600S | 20 | 60 | 100 |
Back-End Processing
| Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
| Wire Bonder | West Bond | Wire_Bonder_454647E | 25 | 75 | 125 |
| Dicing Saw | Disco | Dicing_Saw_DAD3220 | 25 | 75 | 125 |
| Film Frame Wafer Mounter | Ultron Systems | Tape_Mount_UH114 | 0 | 0 | 0 |
| UV Curing System | Ultron Systems | UV _Curing_ UH102 | 0 | 0 | 0 |
Chemical Hoods
| Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
| Resist Hood | Air Control | Spinner_Hood | 0 | 0 | 0 |
| Development Hood | Air Control | Developer_Hood | 0 | 0 | 0 |
| Solvent Hood | Air Control | Solvent_Hood | 0 | 0 | 0 |
| HF/Piranha Hood | Air Control | HF_Piranha_Hood | 0 | 0 | 0 |
| Metal/Caustic Etch Hood | Air Control | Caustic_Hood | 0 | 0 | 0 |
| RCA Cleaning Hood | Air Control | RCA_Hood | 0 | 0 | 0 |
| Spin Rinse Dryer | OEM Group | SRD_470S | 0 | 0 | 0 |
Additional Items
| Item | Cost | Unit |
| SU-8 Developer | $16.63 | 500 ml |
| Remover PG | $22.88 | 500 ml |
| Gold E-Beam Evaporation | $0.75 | 1 nm |