Equipment Rates

Academic, Start-Up and Industry Rates (subject to change)

Academic Members Monthly Cap: $1500

Lithography

Equipment	Manufacturer	Badger Name	Academic Rate ($/hr)	Start-Up Rate ($/hr)	Industry Rate ($/hr)
Electron Beam Lithography – 50keV	Elionix	EBL_Elionix	50	150	250
Electron Beam Lithography – 100keV	Elionix	EBL_Elionix	45	135	225
3D Lithography System	Nanoscribe	3DLitho_GT	35	105	175
Mask Aligner	EV Group	Mask_Aligner_EVG620	28	84	140
Photo Resist Spinner	Brewer Scientific	Photo_Spinner	18	54	90
Ebeam Resist Spinner	Brewer Scientific	EBL_Spinner	18	54	90
Non Standard Materials Spinner	Brewer Scientific	Other_Spinner	18	54	90

Deposition

Equipment	Manufacturer	Badger Name	Academic Rate ($/hr)	Start-Up Rate ($/hr)	Industry Rate ($/hr)
Atomic Layer Deposition	Ultratech Cambridge NanoTech	ALD_Fiji	30	90	150
PECVD	Oxford Instruments	PECVD_SYS100	36	108	180
Ebeam and Thermal Evaporator	AJA International	Ebeam_Evap_O8E	35	105	175
Sputtering System	AJA International	Sputter_O8	25	75	125
Thermal Evaporator	AJA International	Thermal_Evap_O3TH	15	45	75
Sputter Coater	Cressington Scientific Instruments	Sputter_Coat_108A	35	105	175

Etching

Equipment	Manufacturer	Badger Name	Academic Rate ($/hr)	Start-Up Rate ($/hr)	Industry Rate ($/hr)
Chlorine ICP Etcher	Oxford Instruments	ICP_Cl_SYS100	40	120	200
Fluorine ICP Etcher	Oxford Instruments	ICP_Fl_SYS100	40	120	200
DRIE Etcher	Oxford Instruments	DRIE_FL_SYS100	45	135	225
Reactive Ion Etcher	Oxford Instruments	RIE_NPG80	38	114	190
Plasma Asher	PVA TePla	Plasma_Asher_ION40	25	75	125
UV Ozone Cleaner	SAMCO	UV_Ozone_UV2	20	60	100
Vapor HF Etcher	SPTS Technologies	VaporHF_Primaxx	20	60	100
Xenon Difluoride Etcher	SPTS Technologies	XeF2_Etch_E1	20	60	100

Metrology

Equipment	Manufacturer	Badger Name	Academic Rate ($/hr)	Start-Up Rate ($/hr)	Industry Rate ($/hr)
Scanning Electron Microscope	FEI	SEM_NovaNano	30	90	150
Atomic Force Microscope	Bruker	AFM_Dimension	28	84	140
Surface Profilometer	Bruker	Stylus_Prof_Dektak	18	54	90
Optical Profilometer	Bruker	Optical_Prof_GT-I	15	45	75
Ellipsometer	J.A. Woollam	Ellipsometer_VVase	18	54	90
Thin Film Analyzer	Filmetrics	Reflectometer_F20	0	0	0

Thermal Processing

Equipment	Manufacturer	Badger Name	Academic Rate ($/hr)	Start-Up Rate ($/hr)	Industry Rate ($/hr)
Furnace – Thermal Oxide	Tystar	Furnace_Thermal_Oxide	25	75	125
Furnace – Anneal	Tystar	Furnace_Anneal	25	75	125
Furnace – LPCVD Nitride	Tystar	Furnace_Nitride	30	90	150
Furnace – LPCVD TEOS	Tystar	Furnace_TEOS	30	90	150
Rapid Thermal Annealer	MPT	RTA_600S	15	45	75

Back-End Processing

Equipment	Manufacturer	Badger Name	Academic Rate ($/hr)	Start-Up Rate ($/hr)	Industry Rate ($/hr)
Wire Bonder	West Bond	Wire_Bonder_454647E	23	69	115
Dicing Saw	Disco	Dicing_Saw_DAD3220	23	69	115
Film Frame Wafer Mounter	Ultron Systems	Tape_Mount_UH114	0	0	0
UV Curing System	Ultron Systems	UV _Curing_ UH102	0	0	0

Chemical Hoods

Equipment	Manufacturer	Badger Name	Academic Rate ($/hr)	Start-Up Rate ($/hr)	Industry Rate ($/hr)
Resist Hood	Air Control	Spinner_Hood	0	0	0
Development Hood	Air Control	Developer_Hood	0	0	0
Solvent Hood	Air Control	Solvent_Hood	0	0	0
HF/Piranha Hood	Air Control	HF_Piranha_Hood	0	0	0
Metal/Caustic Etch Hood	Air Control	Caustic_Hood	0	0	0
RCA Cleaning Hood	Air Control	RCA_Hood	0	0	0
Spin Rinse Dryer	OEM Group	SRD_470S	0	0	0

Additional Items

Item	Cost	Unit
SU-8 Developer	$16.63	500 ml
Remover PG	$22.88	500 ml
Gold E-Beam Evaporation	$0.65	1 nm