Academic, Start-Up and Industry Rates (subject to change)
Academic Members Monthly Cap: $1500
Lithography
Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
Electron Beam Lithography – 50keV | Elionix | EBL_Elionix | 50 | 150 | 250 |
Electron Beam Lithography – 100keV | Elionix | EBL_Elionix | 45 | 135 | 225 |
3D Lithography System | Nanoscribe | 3DLitho_GT | 35 | 105 | 175 |
Mask Aligner | EV Group | Mask_Aligner_EVG620 | 28 | 84 | 140 |
Photo Resist Spinner | Brewer Scientific | Photo_Spinner | 18 | 54 | 90 |
Ebeam Resist Spinner | Brewer Scientific | EBL_Spinner | 18 | 54 | 90 |
Non Standard Materials Spinner | Brewer Scientific | Other_Spinner | 18 | 54 | 90 |
Deposition
Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
Atomic Layer Deposition | Ultratech Cambridge NanoTech | ALD_Fiji | 30 | 90 | 150 |
PECVD | Oxford Instruments | PECVD_SYS100 | 36 | 108 | 180 |
Ebeam and Thermal Evaporator | AJA International | Ebeam_Evap_O8E | 35 | 105 | 175 |
Sputtering System | AJA International | Sputter_O8 | 25 | 75 | 125 |
Thermal Evaporator | AJA International | Thermal_Evap_O3TH | 15 | 45 | 75 |
Sputter Coater | Cressington Scientific Instruments | Sputter_Coat_108A | 35 | 105 | 175 |
Etching
Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
Chlorine ICP Etcher | Oxford Instruments | ICP_Cl_SYS100 | 40 | 120 | 200 |
Fluorine ICP Etcher | Oxford Instruments | ICP_Fl_SYS100 | 40 | 120 | 200 |
DRIE Etcher | Oxford Instruments | DRIE_FL_SYS100 | 45 | 135 | 225 |
Reactive Ion Etcher | Oxford Instruments | RIE_NPG80 | 38 | 114 | 190 |
Plasma Asher | PVA TePla | Plasma_Asher_ION40 | 25 | 75 | 125 |
UV Ozone Cleaner | SAMCO | UV_Ozone_UV2 | 20 | 60 | 100 |
Vapor HF Etcher | SPTS Technologies | VaporHF_Primaxx | 20 | 60 | 100 |
Xenon Difluoride Etcher | SPTS Technologies | XeF2_Etch_E1 | 20 | 60 | 100 |
Metrology
Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
Scanning Electron Microscope | FEI | SEM_NovaNano | 30 | 90 | 150 |
Atomic Force Microscope | Bruker | AFM_Dimension | 28 | 84 | 140 |
Surface Profilometer | Bruker | Stylus_Prof_Dektak | 18 | 54 | 90 |
Optical Profilometer | Bruker | Optical_Prof_GT-I | 15 | 45 | 75 |
Ellipsometer | J.A. Woollam | Ellipsometer_VVase | 18 | 54 | 90 |
Thin Film Analyzer | Filmetrics | Reflectometer_F20 | 0 | 0 | 0 |
Thermal Processing
Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
Furnace – Thermal Oxide | Tystar | Furnace_Thermal_Oxide | 25 | 75 | 125 |
Furnace – Anneal | Tystar | Furnace_Anneal | 25 | 75 | 125 |
Furnace – LPCVD Nitride | Tystar | Furnace_Nitride | 30 | 90 | 150 |
Furnace – LPCVD TEOS | Tystar | Furnace_TEOS | 30 | 90 | 150 |
Rapid Thermal Annealer | MPT | RTA_600S | 15 | 45 | 75 |
Back-End Processing
Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
Wire Bonder | West Bond | Wire_Bonder_454647E | 23 | 69 | 115 |
Dicing Saw | Disco | Dicing_Saw_DAD3220 | 23 | 69 | 115 |
Film Frame Wafer Mounter | Ultron Systems | Tape_Mount_UH114 | 0 | 0 | 0 |
UV Curing System | Ultron Systems | UV _Curing_ UH102 | 0 | 0 | 0 |
Chemical Hoods
Equipment | Manufacturer | Badger Name | Academic Rate ($/hr) | Start-Up Rate ($/hr) | Industry Rate ($/hr) |
Resist Hood | Air Control | Spinner_Hood | 0 | 0 | 0 |
Development Hood | Air Control | Developer_Hood | 0 | 0 | 0 |
Solvent Hood | Air Control | Solvent_Hood | 0 | 0 | 0 |
HF/Piranha Hood | Air Control | HF_Piranha_Hood | 0 | 0 | 0 |
Metal/Caustic Etch Hood | Air Control | Caustic_Hood | 0 | 0 | 0 |
RCA Cleaning Hood | Air Control | RCA_Hood | 0 | 0 | 0 |
Spin Rinse Dryer | OEM Group | SRD_470S | 0 | 0 | 0 |
Additional Items
Item | Cost | Unit |
SU-8 Developer | $16.63 | 500 ml |
Remover PG | $22.88 | 500 ml |
Gold E-Beam Evaporation | $0.80 | 1 nm |