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Nanofabrication Facility

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Instruments and Tools

Lithography

  • photo: Nanoscribe Photonic Professional GT 3d Lithography system

    3D Lithography System ›

    The Nanoscribe Photonic Professional 3D Lithography System is an easy-to-operate table-top laser lithography system that enables the fabrication of true three-dimensional nanostructures using commercially available photoresists
  • photo: SPX Thermal Product Solutions Curing ovens

    Curing Ovens ›

    Two ultra-stable Blue M Ovens for soft and hard baking of photoresists

  • Electron Beam Lithography System – 100 KeV ›

    The Elionix ELS-G100 is a high speed, ultra high precision thermal field emission electron-beam lithography system.

  • Electron Beam Lithography System – 50 KeV ›

    The 50 KeV Elionix is a high speed lithography system optimized for large area and high speed pattern writing.
  • photo: EV group mask aligner

    Mask Aligner ›

    The EVG620 Mask Aligner is equipped with high-resolution top and/or bottom side microscopes for single or double-side photolithography.
  • photo: Brewer Science e-beam spin coater

    Spin Coater – E-Beam Resists ›

    The Brewer Science Cee Stand-Alone Spin Coater/hotplate is dedicated for the spinning of electron beam resists.
  • photo: Brewer Science photoresist and other materials spin coaters

    Spin Coater – Photoresist and Other ›

    Two additional Brewer Science Cee Spin Coaters are dedicated for photoresist processing and other non-standard materials
  • photo: SAMCO UV ozone cleaner

    UV Ozone Cleaner ›

    The SAMCO UV-2 is a compact, benchtop, UV-ozone cleaning system that will not damage delicate electronic devices.