Spin Coater – E-Beam Resists

photo: Brewer Science e-beam spin coater

The Brewer Science Cee Stand-Alone Spin Coater/hotplate is dedicated for the spinning of electron beam resists. The tool is capable of spin coating substrates up to 7” square or 200-mm round and features high torque for maximum ramping capability.  You can also spin coat smaller size substrates (<1 cm through 200 mm) using a wide array of spin-coating chuck sizes. The precision hotplate has a temperature range from ambient to 300 ˚C with resolution of +/- 0.1 ˚C and uniformity of 0.3% across the working surface.

Specifications

  • 0.1-second resolution for step times
  • Spin speed: 0 to 12,000 rpm
  • Spin speed acceleration:
    • 0 to 30,000 rpm/s unloaded
    • 0 to 23,000 rpm/s 200-mm substrate
    • 0 to 3,000 rpm/s 6” × 6” × 0.250” photomask recessed chuck

Contacts

  • Milan Begliarbekov, Ph.D.
    Technical Cleanroom Manager, Nanofabrication Facility
    Research Assistant Professor, Nanoscience Initiative
    mbegliarbekov@gc.cuny.edu

Manufacturer / Model

Brewer Science / Cee Model 200cbx

Facility

Nanofabrication Facility

Keywords

lithography