Curing Ovens

photo: SPX Thermal Product Solutions Curing ovens

Two ultra-stable Blue M Ovens for soft and hard baking of photoresists as well as post coat baking of spin on dopants and spin on glass are available in the lithography bay.


Contacts

  • Milan Begliarbekov, Ph.D.
    Technical Cleanroom Manager, Nanofabrication Facility
    Research Assistant Professor, Nanoscience Initiative
    mbegliarbekov@gc.cuny.edu

Manufacturer / Model

SPX Thermal Product Solutions / Blue M 146

Facility

Nanofabrication Facility

Keywords

lithography