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Surface Science Facility

The Surface Science Facility offers cutting-edge surface analyzing instruments for academic and industrial researchers. The facility currently has three core instruments: (1) X-ray photoelectron spectroscopy (XPS) to measure the elemental composition, empirical formula, chemical state, and electronic state of sample surface; (2) time-of-flight secondary ion mass spectrometer (TOF-SIMS) to perform elemental trace measurements of the top atomic layers of the sample surface; and (3) atomic force microscopy (AFM) to image surface topography and stiffness with nanometer resolution in air and liquid environments. Typical applications include the research fields of semiconductor devices, synthetic chemistry, nano-materials, bio-materials, 2D materials, surface coating, and biology.

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