Nanofabrication Facility

Dicing Saw – Download SOP

Spin Rinse Dryer – none

Tape Mounter – none

Wire Bonder – none

Atomic Layer Deposition System – Download SOP

E-beam and Thermal Evaporating System – none

LPCVD Furnace Stack – none

Plasma Enhanced Chemical Vapor Deposition System (PECVD) – Download SOP

RF Sputter Deposition System – Download SOP

Sputter Coater – Download SOP

Inductively Coupled Plasma Etch – Chlorine Based (ICP Cl) – none

Inductively Coupled Plasma Etch – Fluorine Based (ICP Fl) – none

Plasma Asher – Download SOP

Reactive Ion Etch (RIE) – none

Vapor Hydrofluoric Acid Etcher (Vapor HF) – Download SOP

Xenon Difluoride Etcher (XeF2) – Download SOP

3D Lithography System – Download SOP

Curing Ovens – none

Electron Beam Lithography System – EBL SOP & WECAS SOP

Mask Aligner – Download SOP

Spin Coater – E-Beam Resists – none

Spin Coater – Photoresist and Other – none

UV Ozone Cleaner – Download SOP

3D Optical Profiler – Download SOP

Atomic Force Microscope (AFM) – none

Ellipsometer – Download SOP

Field Emission Scanning Electron Microscope (FE-SEM) – Download SOP

Inspection Microscopes – none

Probe Station – none

Stylus Profiler – Download SOP

Thin Film Analyzer – none

Furnace Stack – none

Rapid Thermal Anneal (RTA) – none

All users of the AJA e-beam evaporators are required to sign-up for the Nanofabrication Facility Slack site. Please read the instructions on how to sign-up and utilize Slack.

Joining Slack Channels

The Nanofabrication Facility Slack site utilizes channels #ebeamevaportor for ongoing discussions between users on crucible changes. Once you have access to the Slack page, you can join these channels with the following steps:

Click on CHANNELS on the top left of the Slack site
This will open the channel browser, where you can search, sort, and explore all the channels.
To join a specific channel, click the Join Channel button and you will then have access to these topic specific channels.

E-Beam Evaporator Material Changes

Chamber venting and material changes will be carried out by Nanofabrication staff based on necessary maintenance and requests to change materials.  Material changes can be requested via the procedure below.

1. Current materials can be found in the ASRC Deposition Materials.
2. To request a new materials should be made using the ASRC Deposition Material Request Sheet.  Be sure you’ve selected the correct tab for either the AJA Metal Evaporator or the AJA Organic Evaporator.
3. Fill in the material you need along with the date by which you will need it installed.  Do not neglect to put your name and email in case we need to contact you.
4. Please use the Slack Channel #ebeamevaportor for any discussions with fellow users and staff as needed, however the Upcoming Changes list will be the final scheduling tool.
5. Never delete another users’ entry.
6. Bring up any scheduling issues via the Slack channel.
7. Cr, Ti and Au will always be kept in the chamber unless staff have reason to change it out temporarily. This will be communicated if we do so.
8. Please be considerate when filling out your slots. staff always have the right to make changes (with sufficient notification) and will monitor any abuse of scheduling.

Keep in mind that pumping the chamber after opening will take at least one day.

Download Sputter Parameters Table (PDF)

Sputter Slack

All users of the Sputter Deposition System are required to sign-up for the Nanofabrication Facility Slack site and use the #sputterdeposition channels for ongoing discussions between users on target.

How to sign-up for and use Slack »

Once you have access to the Slack site, you can join these channels with the following steps:

• Click CHANNELS in the top left of the Slack site
• This will open the channel browser, where you can search, sort, and explore all the channels.
• To join a specific channel, click the Join Channel button.

Sputter Target Changes

Chamber venting and material changes will be carried out by Nanofabrication staff based on necessary maintenance and requests to change materials.  Material changes can be requested via the procedure below.

1. Current materials can be found in the ASRC Deposition Materials.
2. To request a new materials should be made using the ASRC Deposition Material Request Sheet.  Be sure you’ve selected the correct tab for either the AJA Sputter.
3. Fill in the material you need along with the date by which you will need it installed.  Do not neglect to put your name and email in case we need to contact you.
4. Please use the Slack Channel #sputterdeposition for any discussions with fellow users and staff as needed, however the Upcoming Changes list will be the final scheduling tool.
5. Never delete another users’ entry.
6. Bring up any scheduling issues via the Slack channel.
7. Please be considerate when filling out your slots. staff always have the right to make changes (with sufficient notification) and will monitor any abuse of scheduling.

Keep in mind that the chamber will need to pump overnight after venting for the material change.

The Oxford PlasmaPro System runs in ICP and DRIE mode, but requires extensive cleaning to go from one mode to another. To assure high levels and cleanliness and more repeatable processing, etching is limited to either ICP or DRIE etching depending on the week.

View a schedule of current and planned modes »