![photo: SPX Thermal Product Solutions Curing ovens](https://asrc.gc.cuny.edu/wp-content/uploads/media/instruments/curing-ovens/nanofab-lithography-ovens.jpg)
Curing Ovens
![photo: SPX Thermal Product Solutions Curing ovens](https://asrc.gc.cuny.edu/wp-content/uploads/media/instruments/curing-ovens/nanofab-lithography-ovens.jpg)
Two ultra-stable Blue M Ovens for soft and hard baking of photoresists as well as post coat baking of spin on dopants and spin on glass are available in the lithography bay.
Manufacturer / Model
SPX Thermal Product Solutions / Blue M 146
Facility
Nanofabrication Facility
Keywords
lithography