UV Ozone Cleaner

photo: SAMCO UV ozone cleaner

The SAMCO UV-2 is a compact, benchtop, UV-ozone cleaning system that will not damage delicate electronic devices. The system utilizes a combination of ultraviolet radiation, ozone, and heat to organic materials from a variety of substrates; these include silicon, gallium arsenide, sapphire, metals, ceramics, quartz and glass. The UV-1 is suited for applications involving substrate cleaning, photoresist descumming, improving wettability and UV curing. The system is compatible with substrates up to 150 mm in diameter and up to 15 mm-thick. The substrate heater is capable of temperatures from ambient to 300 C.

Contacts

Manufacturer / Model

SAMCO / UV-2

Facility

Nanofabrication Facility

Keywords

lithography