Thermal Evaporation System

The AJA Orion 3-TH Evaporator System is a thermal evaporation system, configured with 3 thermal evaporation sources.  The system is restricted to evaporating metal films. It is intended for quick depositions that do not require a load lock. Above are listed standard films provided by ASRC Nanofabrication Facility. Additional metals must be approved by cleanroom staff and provided by the member.

Processes

• Metals: Au, Al, Cr, Ti, Ge, Cu, Pt