Inspection Microscopes

photo: Nikon Eclipse inspection microscope

Several Nikon Eclipse Inspection Microscopes are located throughout the cleanroom. The system has a 6”x6” stage and is configured with bright-field, dark-field, and simple polarizing objectives. The microscopes are fitted with a Nikon DigiSight Color Digital Camera Head (5 megapixels) and a PC with Nikon’s NIS-Elements software.

Specifications

  • Objectives: Infinity CFI60-2 lens with magnifications of 2.5x, 10x, 20x, 50x, and 100x

Manufacturer / Model

Nikon / Eclipse LV150N-CH

Facility

Nanofabrication Facility

Keywords

metrology