Hotplate Tower

photo: lithography hotplate tower

The Air Control Microvoid Hot Plate tower is a vented tower that holds several dedicated hotplates for pre and post baking photoresists.


  • Milan Begliarbekov, Ph.D.
    Technical Cleanroom Manager, Nanofabrication Facility
    Research Assistant Professor, Nanoscience Initiative

Manufacturer / Model

Reynolds Tech / custom


Nanofabrication Facility