E-beam & Thermal Evaporation System

photo: AJA International e-beam and thermal evaporation system

The AJA Orion 8E Evaporator System is capable of both electron beam (e-beam) and thermal evaporation. The system is configured with 2 thermal evaporation sources and 6 crucibles (15cc) for e-beam evaporation with automated indexing.  The two thermal sources can be independently swung to a center position prior to deposition. The system is restricted to evaporating metal films. The system is also configured with substrate rotation for added uniformity, substrate cooling, a load lock, and DC biasing for substrate pre-cleaning.

Processes

Metals: Al, Al2O3, Cr, Co, Cu, Ge, Ag, In, Fe, Ni, Nb, Pd, Pt, Fe/Ni, Ag, Ti, Yt

Contacts

Manufacturer / Model

AJA International / Orion-8E

Facility

Nanofabrication Facility

Keywords

deposition