ASRC logo

Equipment Type

Field Emission Scanning Electron Microscope (FE-SEM)




Nova NanoSEM 450


SEM Room


CCD IR inspection camera
High-resolution multi-stub holder
Through-lens SED (TLD)
Everhart-Thornley SED
Low-vacuum SED (LVD)
Through-lens BSED (TLD-B)
Beam deceleration
Retractable DBS Detector – high sensitivity low kV BS/SE detector
Integrated Plasma Cleaner

The FEI Nova NanoSEM™ is a high resolution scanning electron microscope intended for sample characterization. In addition to the SEM features, the Nova system is configured with a beam blanker and the Raith ELPHY Quantum software to enable electron beam lithography for users who do not require the ultra-high resolution of the Elionix system.