Equipment Type
Vapor HF Etcher
Manufacturer
SPTS
Model
Primaxx
Location
Plasma Bay
Processes
Isotropic etching of all types of SiO2
The SPTS Primaxx Vapor HF Etcher is used primarily for isotropic etching of all types of SiO2 and offers a safer alternative to liquid- HF processes. Furthermore, the dry-HF process eliminates the stiction problems often encountered in releasing SOI-MEMS devices.