Vapor HF

The SPTS Primaxx Vapor HF Etcher is used primarily for isotropic etching of all types of SiOand offers a safer alternative to liquid- HF processes. Furthermore, the dry-HF process eliminates the stiction problems often encountered in releasing SOI-MEMS devices.

Equipment Type

Vapor HF Etcher

Manufacturer

SPTS

Model

Primaxx

Location

Plasma Bay

Processes

Isotropic etching of all types of SiO2