The SPTS Primaxx Vapor HF Etcher is used primarily for isotropic etching of all types of SiO2 and offers a safer alternative to liquid- HF processes. Furthermore, the dry-HF process eliminates the stiction problems often encountered in releasing SOI-MEMS devices.
Equipment Type
Vapor HF Etcher
Manufacturer
SPTS
Model
Primaxx
Location
Plasma Bay
Processes
Isotropic etching of all types of SiO2