Thermal Evaporator

The AJA Orion 3-TH Evaporator System is a thermal evaporation system, configured with 3 thermal evaporation sources.  The system is restricted to evaporating metal films. It is intended for quick depositions that do not require a load lock. Below are listed standard films provided by ASRC NanoFab. Additional metals must be approved by cleanroom staff and provided by the member.

Equipment Type

Thermal Evaporation System

Manufacturer

AJA International

Model

Orion-3-TH

Location

Deposition Bay

Processes

Metals: Au, Al, Cr, Ti, Ge, Cu, Pt